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[IEEE 2019 Compound Semiconductor Week (CSW) - Nara, Japan (2019.5.19-2019.5.23)] 2019 Compound Semiconductor Week (CSW) - Evaluate Fixed Charge and Oxide Trapped Charge on SiO 2 /GaN MOS Structure Before and After Post Annealing
Furukawa, Masaaki, Uenuma, Mutsunori, Ishikawa, Yasuaki, Uraoka, YukiharuYear:
2019
Language:
english
DOI:
10.1109/iciprm.2019.8819073
File:
PDF, 1.55 MB
english, 2019