[IEEE 2019 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP) - Bochum, Germany (2019.7.16-2019.7.18)] 2019 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP) - An Error Compensation Algorithm for Indirect Resonant Planar Relative Permittivity Sensor Principles up to 100 GHz