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Heat and Mass Transfer Analysis during SiO2 Film Coating by Thermal CVD
KURIHARA, Kazuhiro, HONDA, Misaki, TANOUE, Ken-ichiroVolume:
98
Language:
english
Journal:
Journal of the Japan Institute of Energy
DOI:
10.3775/jie.98.272
Date:
October, 2019
File:
PDF, 3.38 MB
english, 2019