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Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target
Rausch, Martin, Mráz, Stanislav, Kreiml, Patrice, Cordill, Megan J., Schneider, Jochen M., Winkler, Jörg, Mitterer, ChristianVolume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5138248
Date:
March, 2020
File:
PDF, 3.30 MB
english, 2020