Large-scale ferromagnetic enhanced Ar/Cl2 ICP

Plasma Sources Science and Technology 2020 / 03

Large-scale ferromagnetic enhanced Ar/Cl2 ICP

Fedoseev, Alexander, Isupov, Mikhail V, Demin, Nikon, Sukhinin, G I
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Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab8058
Date:
March, 2020
File:
PDF, 1.68 MB
english, 2020
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