Characteristics of ICP and helicon plasma in a single loop...

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Plasma Science and Technology 2020 / 04

Characteristics of ICP and helicon plasma in a single loop antenna

Zhang, Tianliang, Jiang, Kaiyin, Liu, Zhongwei, Yang, Lizhen, Zhang, Haibao, Ouyang, Jiting, Chen, Qiang
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Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/2058-6272/ab8551
Date:
April, 2020
File:
PDF, 1.69 MB
english, 2020
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