[IEEE 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO) - Macao (2019.7.22-2019.7.26)] 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO) - Effect of Thin SiO 2 Layer on Silicon-on-Glass Anodic Bonding *
Chen, Zikun, Gao, Chengwu, Guan, Taotao, Yang, Fang, Shi, Longzhao, Zhang, DachengYear:
2019
Language:
english
DOI:
10.1109/nano46743.2019.8993680
File:
PDF, 5.14 MB
english, 2019