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[IEEE SAS2008 - IEEE Sensors Applications Symposium - Atlanta, GA (2008.2.12-2008.2.14)] 2008 IEEE Sensors Applications Symposium - Scanning micro-interferometer array with sub-picometer resolution for MEMS inspection

Karhade, Omkar G., Degertekin, Levent, Kurfess, Thomas R.
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Year:
2008
Language:
english
DOI:
10.1109/sas13374.2008.4472954
File:
PDF, 1.07 MB
english, 2008
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