Variations in Micromachined Isolator Geometries for Sensor...

IEEE Transactions on Components Packaging and Manufacturing Technology 2020 / 4 Vol. 10; Iss. 4

Variations in Micromachined Isolator Geometries for Sensor Performance in Harsh Environments

Bottenfield, Brent, Bond, Arthur Gernt, Kranz, Michael S., Dean, Robert N., Adams, Mark L.
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Volume:
10
Language:
english
Journal:
IEEE Transactions on Components, Packaging and Manufacturing Technology
DOI:
10.1109/tcpmt.2019.2947191
Date:
April, 2020
File:
PDF, 3.49 MB
english, 2020
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