[IEEE 2019 20th International Conference on Solid-State...

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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection

Wang, Zhuqing, Hokama, Takumi, Toda, Masaya, Yamazaki, Mai, Moorthi, Krzysztof, Ono, Takahito
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Year:
2019
Language:
english
DOI:
10.1109/transducers.2019.8808616
File:
PDF, 951 KB
english, 2019
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