[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Nanostructured al SWG Reflectors on thin LP-Si 3 N 4 Membranes as (TiO 2 /SiO 2 )³ Bragg Reflector Alternative for Vis Fabry-Pérot Interferometers
Helke, Christian, Hiller, Karla, Seiler, Jan, Erben, Jens W., Werner, Thomas, Reuter, Danny, Meinig, Marco, Kurth, Steffen, Otto, ThomasYear:
2019
Language:
english
DOI:
10.1109/transducers.2019.8808419
File:
PDF, 3.36 MB
english, 2019
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