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[IEEE 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Singapore, Singapore (2019.3.12-2019.3.15)] 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Simultaneous doping / etching (SDE) process of multilayer graphene on Ni for low resistance metallization
Yokosawa, Kosuke, Akimoto, Tomoki, Okada, Yuri, Ueno, KazuyoshiYear:
2019
Language:
english
DOI:
10.1109/edtm.2019.8731211
File:
PDF, 4.51 MB
english, 2019