Effect of an Alkoxyliertes Beta Naphthol on Cu...

Bulletin of the Korean Chemical Society 2020 / 03

Effect of an Alkoxyliertes Beta Naphthol on Cu Electrodeposition for Application to Low‐Resistivity Cu Interconnects

Suh, Hoyoung, Heo, Mina, Lee, Ji‐Hyun, Kim, Jin‐Gyu, Hong, Kimin
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Journal:
Bulletin of the Korean Chemical Society
DOI:
10.1002/bkcs.12003
Date:
March, 2020
File:
PDF, 1008 KB
2020
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