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Microsystem Technologies 2020 / 3

A class of biaxial micro/meso-scale structures for isotropic in-plane inertial sensing and actuation: design, fabrication and experiments

Shan, Xiaowei, Angeles, Jorge, Forbes, James Richard
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Journal:
Microsystem Technologies
DOI:
10.1007/s00542-020-04803-y
Date:
March, 2020
File:
PDF, 2.63 MB
2020
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