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Hybrid lubricant film with high bonding ratio and high coverage
Tani, Hiroshi, Uesaraie, Yuki, Lu, Reguo, Koganezawa, Shinji, Tagawa, NorioJournal:
Microsystem Technologies
DOI:
10.1007/s00542-020-04806-9
Date:
March, 2020
File:
PDF, 1.45 MB
2020