Formation mechanism and compensation methods of profile...

Formation mechanism and compensation methods of profile error in focused ion beam milling of three-dimensional optical microstructures

Chen, Xiao, Ren, Zhenzhou, Zhu, Yan, Wang, Yixing, Zhang, Jianguo, Wang, Xuefang, Xu, Jianfeng
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Volume:
2
Journal:
SN Applied Sciences
DOI:
10.1007/s42452-020-2456-2
Date:
April, 2020
File:
PDF, 2.99 MB
2020
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