Design, fabrication and characterization of piezoelectric...

Micro and Nano Engineering 2020 / 06 Vol. 7

Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application

Abdul, B., Mastronardi, V.M., Qualtieri, A., Guido, F., Algieri, L., Rizzi, F., De Vittorio, M.
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Volume:
7
Journal:
Micro and Nano Engineering
DOI:
10.1016/j.mne.2020.100050
Date:
June, 2020
File:
PDF, 2.28 MB
2020
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