A review on piezoelectric ultrasonic motors for the past...

Sensors and Actuators A: Physical 2020 / 05 Vol. 306

A review on piezoelectric ultrasonic motors for the past decade: Classification, operating principle, performance, and future work perspectives

Tian, Xinqi, Liu, Yingxiang, Deng, Jie, Wang, Liang, Chen, Weishan
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Volume:
306
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.111971
Date:
May, 2020
File:
PDF, 8.45 MB
2020
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