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Deposition of Cu-films by a planar magnetron sputtering system at ultra-low operating pressure
Shandrikov, M.V., Artamonov, I.D., Bugaev, A.S., Oks, E.M., Oskomov, K.V., Vizir, A.V.Volume:
389
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.125600
Date:
May, 2020
File:
PDF, 1.02 MB
2020