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The influence of pressure and magnetic field on the deposition of epitaxial TiBx thin films from DC magnetron sputtering
Nedfors, Nils, Primetzhofer, Daniel, Zhirkov, Igor, Palisaitis, Justinas, Persson, Per O.Ã ., Greene, J.E., Petrov, Ivan, Rosen, JohannaVolume:
177
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2020.109355
Date:
July, 2020
File:
PDF, 4.37 MB
2020