Development of measurement system for microstructures using...

Measurement Science and Technology 2020 / 07 Vol. 31; Iss. 7

Development of measurement system for microstructures using an optical fiber probe: improvement of measurable region and depth

Murakami, Hiroshi, Katsuki, Akio, Sajima, Takao, Uchiyama, Kosuke, Yoshida, Ichiro, Hamano, Yasuo, Honda, Hiroshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
31
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/ab7efc
Date:
July, 2020
File:
PDF, 773 KB
2020
Conversion to is in progress
Conversion to is failed