Influence of Al Content on Micro-Properties of TiAlSiN...

IOP Conference Series Materials Science and Engineering 2019 / 11 Vol. 678

Influence of Al Content on Micro-Properties of TiAlSiN Coatings Deposited by Plasma Enhanced Magnetron Sputtering

Wang, Yulong, Zhang, Hao, Luo, Chengang, Ran, Xiaoyu, Ren, Zhangpeng, Duo, Shuwang
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Volume:
678
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/678/1/012164
Date:
November, 2019
File:
PDF, 2.41 MB
2019
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