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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - A Novel Fabrication Process of Nano-Cavity Coupled Plasmonic Structures for Colormetric Sensing
Zhu, Jia, Huang, Yun, Zhang, Kenan, Lin, Guanzhou, Wu, WengangYear:
2020
DOI:
10.1109/MEMS46641.2020.9056121
File:
PDF, 1.44 MB
2020