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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Silicon-Chip Based Electromagnetic Vibration Energy Harvesters Rapidly Fabricated by Wafer-Level Molten Metal Micro-Casting Technique
Han, Ruofeng, Wang, Nianying, Xu, Dacheng, Gu, Jiebin, Li, XinxinYear:
2020
DOI:
10.1109/MEMS46641.2020.9056213
File:
PDF, 588 KB
2020