[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Ultra-Sensitive Force Transduction in Weakly Coupled Resonators
Zhang, Hemin, Pandit, Milind, Sun, Jiangkun, Chen, Dongyang, Sobreviela, Guillermo, Zhao, Chun, Seshia, AshwinYear:
2020
DOI:
10.1109/MEMS46641.2020.9056267
File:
PDF, 1.18 MB
2020