[IEEE 2020 IEEE 33rd International Conference on Micro...

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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Ultra-Sensitive Force Transduction in Weakly Coupled Resonators

Zhang, Hemin, Pandit, Milind, Sun, Jiangkun, Chen, Dongyang, Sobreviela, Guillermo, Zhao, Chun, Seshia, Ashwin
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Year:
2020
DOI:
10.1109/MEMS46641.2020.9056267
File:
PDF, 1.18 MB
2020
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