[IEEE 2020 IEEE 33rd International Conference on Micro...

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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Epitaxial Single-Crystal ScAlN on 4H-SiC for High-Velocity, Low-Loss SAW Devices

Gokhale, Vikrant J., Downey, Brian P., Hardy, Matthew T., Jin, Eric N., Roussos, Jason A., Meyer, David J.
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Year:
2020
DOI:
10.1109/MEMS46641.2020.9056271
File:
PDF, 826 KB
2020
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