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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Demonstrating Full Integration Process for Electroactive Polymer Microtransducers to Realize Soft Microchips
Seurre, Laureline, Rohtlaid, Katlin, Nguyen, Giao T.M., Soyer, Caroline, Ghenna, Sofiane, Grondel, Sebastien, Vidal, Frederic, Cagneau, Barthelemy, Plesse, Cedric, Cattan, EricYear:
2020
DOI:
10.1109/MEMS46641.2020.9056371
File:
PDF, 5.72 MB
2020