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Molecular dynamics study of pattern transfer in nanoimprint lithography
Ji-Hoon Kang, Kwang-Seop Kim, Kyung-Woong KimVolume:
25
Language:
english
Pages:
10
DOI:
10.1007/s11249-006-9053-4
Date:
February, 2007
File:
PDF, 919 KB
english, 2007