[IEEE 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - St. Petersburg and Moscow, Russia (2020.1.27-2020.1.30)] 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Design and Implementation of the Sensing Element of the Capacitive Microaccelerometer with a Sandwich Construction Using the Variable Dielectric Displacement Method