[IEEE 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Grenoble, France (2019.4.1-2019.4.3)] 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - UTBOX SOI Structures with High-k Stacks of Hafnia and Alumina
Popov, Vladimir, Ilnitsky, Mikhail, Miakonkikh, Andrey, Antonov, Valentin, Vdovin, Vladimir, Rudenko, Konstantin, Gutakovskiy, Anton, Tyschenko, Ida, Lukichev, VladimirYear:
2019
DOI:
10.1109/eurosoi-ulis45800.2019.9041896
File:
PDF, 588 KB
2019