[IEEE 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Grenoble, France (2019.4.1-2019.4.3)] 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Room- Temperature Anodic Oxidation of Silicon-on-Insulator Structures Produced by Hydrogen Transfer
Tyschenko, Ida, Popov, Igor, Spesivtsev, Evgenij, Popov, VladimirYear:
2019
DOI:
10.1109/eurosoi-ulis45800.2019.9041913
File:
PDF, 1.29 MB
2019