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[IEEE 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Grenoble, France (2019.4.1-2019.4.3)] 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Reduced oxygen partial pressure SiGe condensation for the fabrication of compressively strained SGOI substrates
Valenducq, Damien, Gourhant, Olivier, Blanquet, Elisabeth, Deprat, Fabien, Abbate, Francesco, Guyader, Veronique, Rouchon, DenisYear:
2019
DOI:
10.1109/eurosoi-ulis45800.2019.9041919
File:
PDF, 903 KB
2019