[IEEE 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF) - Lausanne, Switzerland (2019.7.14-2019.7.19)] 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF) - Vibrating Piezoelectric Energy Conversion Efficiency of Sol-Gel PZT Films with Various Crystal Orientations on MEMS Buckled Diaphragm Structures

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