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Ultrasonic Inspection and Self-Healing of Ge and 3C-SiC Semiconductor Membranes
Zhou, L. Q., Colston, G., Myronov, M., Leadley, D. R., Trushkevych, O., Shah, V., Edwards, R. S.Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2020.2981909
File:
PDF, 2.21 MB
2020