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[IEEE 2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA) - Shijiazhuang, China (2019.11.1-2019.11.4)] 2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA) - Structural Optimization for Uniform Displacement Variations in ZnO FBAR Mass Sensor Using Rectangular Frame-Like Driving Electrodes
ZHAO, Xue-li, ZHAO, Zi-nan, QIAN, Zheng-huaYear:
2019
DOI:
10.1109/spawda48812.2019.9019224
File:
PDF, 3.06 MB
2019