Application of ANN for Fault Detection in Overhead...

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IEEE Transactions on Semiconductor Manufacturing 2020

Application of ANN for Fault Detection in Overhead Transport Systems for Semiconductor Fab

Zhakov, Artem, Zhu, Hailong, Siegel, Armin, Rank, Sebastian, Schmidt, Thorsten, Fienhold, Lars, Hummel, Stephan
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Year:
2020
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2020.2984326
File:
PDF, 1.26 MB
2020
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