Effects of polymer residue on the pull-in of suspended...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 03 Vol. 38; Iss. 2

Effects of polymer residue on the pull-in of suspended graphene

Ng, Jimmy, Jones, Talmage, Martinez-Velis, Isaac, Wang, Albert, Hopkins, Jonathan, Xie, Ya-Hong
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5126439
Date:
March, 2020
File:
PDF, 2.65 MB
2020
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