Low-temperature chemical vapor deposition growth of...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 05 Vol. 38; Iss. 3

Low-temperature chemical vapor deposition growth of graphene films enabled by ultrathin alloy catalysts

Olson, Samuel, Zietz, Otto, Tracy, Joshua, Li, Yanlong, Tao, Chenggang, Jiao, Jun
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5144692
Date:
May, 2020
File:
PDF, 3.84 MB
2020
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