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Multilayer Nanoimprinting to Create Hierarchical Stamp Masters for Nanoimprinting of Optical Micro- and Nanostructures
Moharana, Amiya R., AuÃerhuber, Helene M., Mitteramskogler, Tina, Haslinger, Michael J., Mühlberger, Michael M.Volume:
10
Journal:
Coatings
DOI:
10.3390/coatings10030301
Date:
March, 2020
File:
PDF, 34.15 MB
2020