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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Massive Parallel NEMS Flow Restriction Fabricated Using Self-Aligned 3D-Crystallographic Nanolithography
van Kampen, Chris P., Berenschot, Erwin J., Burger, Gert-Jan, Tiggelaar, Roald M., Sanders, Remco G., Gardeniers, Han G., Tas, Niels R.Year:
2020
DOI:
10.1109/MEMS46641.2020.9056175
File:
PDF, 3.00 MB
2020