Effect of precursor stoichiometry on morphology, phase purity, and texture formation of hot filament CVD diamond films grown on Si (100) substrate
Ahmed, Raju, Siddique, Anwar, Saha, Rony, Anderson, Jonathan, Engdahl, Chris, Holtz, Mark, Piner, EdwinJournal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-020-03395-7
Date:
April, 2020
File:
PDF, 1.64 MB
2020