[IEEE 2019 Device Research Conference (DRC) - Ann Arbor, MI, USA (2019.6.23-2019.6.26)] 2019 Device Research Conference (DRC) - Atomic Layer Etching (ALE) of WSe2 Yielding High Mobility p-FETs
Nipane, Ankur, Sebastian, Punnu Jose, Jung, Younghun, Choi, Min Sup, Borah, Abhinandan, Yoo, Won Jong, Hone, James, Teherani, James T.Year:
2019
DOI:
10.1109/drc46940.2019.9046402
File:
PDF, 930 KB
2019