Improved interface quality of atomic-layer-deposited ZrO2...

Thin Solid Films 2020 / 05 Vol. 701

Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes

Lee, Jae Hwan, Park, Bo-Eun, Thompson, David, Choe, Myeonggi, Lee, Zonghoon, Oh, Il-Kwon, Kim, Woo-Hee, Kim, Hyungjun
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Volume:
701
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.137950
Date:
May, 2020
File:
PDF, 3.31 MB
2020
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