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Investigation of plasma uniformity, rotational and vibrational temperature in a 162 MHz multi-electrode capacitive discharge
Sirse, Nishant, Harvey, Cleo, Gaman, Cezar, Ellingboe, Albert RogersJournal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/ab8a93
Date:
April, 2020
File:
PDF, 1014 KB
2020