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[IEEE 2019 International 3D Systems Integration Conference (3DIC) - Sendai, Japan (2019.10.8-2019.10.10)] 2019 International 3D Systems Integration Conference (3DIC) - Impacts of Deposition Temperature and Annealing Condition on Ozone-Ethylene Radical Generation-TEOS-CVD SiO 2 for Low-Temperature TSV Liner Formation
Liang, Rui, Lee, Sungho, Miwa, Yuki, Kumahara, Kousei, Mariappan, Murugesan, Kino, Hisashi, Fukushima, Takafumi, Tanaka, TetsuYear:
2019
DOI:
10.1109/3DIC48104.2019.9058843
File:
PDF, 5.58 MB
2019