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Erratum: âHistory of atomic layer deposition and its relationship with the American Vacuum Societyâ [J. Vac. Sci. Technol. A 31, 050818 (2013)]
Parsons, Gregory N., Elam, Jeffrey W., George, Steven M., Haukka, Suvi, Jeon, Hyeongtag, (Erwin) Kessels, W. M. M., Leskelä, Markku, Poodt, Paul, Ritala, Mikko, Rossnagel, Steven M.Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000143
Date:
May, 2020
File:
PDF, 756 KB
2020