Growth Rate Reproducibility for Magnesium Fluoride Films by...

Growth Rate Reproducibility for Magnesium Fluoride Films by Sputtering

KAWAMATA, Ken, DEGUCHI, Takeshi
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Volume:
46
Year:
2003
Journal:
SHINKU
DOI:
10.3131/jvsj.46.624
File:
PDF, 404 KB
2003
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