Mechanical Properties of 3D Nanostructures Obtained by...

Micromachines 2020 / 04 Vol. 11; Iss. 4

Mechanical Properties of 3D Nanostructures Obtained by Focused Electron/Ion Beam-Induced Deposition: A Review

Utke, Ivo, Michler, Johann, Winkler, Robert, Plank, Harald
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Volume:
11
Journal:
Micromachines
DOI:
10.3390/mi11040397
Date:
April, 2020
File:
PDF, 14.03 MB
2020
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