MEMS fabrication of compliant sheet for micro hexapod...

Japanese Journal of Applied Physics 2020 / 06 Vol. 59; Iss. SI

MEMS fabrication of compliant sheet for micro hexapod robots

Asamura, Kazuto, Nagasawa, Sumito
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Volume:
59
Journal:
Japanese Journal of Applied Physics
DOI:
10.35848/1347-4065/ab7439
Date:
June, 2020
File:
PDF, 2.49 MB
2020
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