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Nanotechnology and Precision Engineering 2020 / 4

Molecular dynamics simulation on the effect of dislocation structures on the retention and distribution of helium ions implanted into silicon

Ji, Li, Liu, Lei, Xu, Zongwei, Song, Ying, Wu, Jintong, Li, Rongrong, Fang, Fengzhou
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Journal:
Nanotechnology and Precision Engineering
DOI:
10.1016/j.npe.2020.03.003
Date:
April, 2020
File:
PDF, 3.02 MB
2020
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